A device integration method and integrated device. The method may include
the steps of directly bonding a semiconductor device having a substrate
to an element; and removing a portion of the substrate to expose a
remaining portion of the semiconductor device after bonding. The element
may include one of a substrate used for thermal spreading, impedance
matching or for RF isolation, an antenna, and a matching network
comprised of passive elements. A second thermal spreading substrate may
be bonded to the remaining portion of the semiconductor device.
Interconnections may be made through the first or second substrates. The
method may also include bonding a plurality of semiconductor devices to
an element, and the element may have recesses in which the semiconductor
devices are disposed. A conductor array having a plurality of contact
structures may be formed on an exposed surface of the semiconductor
device, vias may be formed through the semiconductor device to device
regions, and interconnection may be formed between said device regions
and said contact structures.