An integrated three-dimensional magnetic or any field sensing device and a
method to fabricate an integrated three-dimensional magnetic sensing
device is presented. An integrated three-dimensional magnetic sensing
device comprises an apparatus that defines at least a first surface area
and at least one sloped surface which is sloped with respect to the first
surface area. Two magnetic sensing units could be arranged on the first
surface area to provide first and second orthogonal sensing directions,
and a third magnetic sensing unit could be arranged on the at least one
sloped surface to provide sensing in at least a third sensing direction
which is orthogonal to the first and second orthogonal sensing
directions. Bias could be applied to the third magnetic sensing unit to
cancel a component of the magnetic field sensed by the third magnetic
sensing unit so that the third magnetic sensor unit only provides sensing
in the third direction.