An electrode array which has applications for neural stimulation and
sensing. The electrode array can include a large number of electrodes
each of which is flexibly attached to a common substrate using a
plurality of springs to allow the electrodes to move independently. The
electrode array can be formed from a combination of bulk and surface
micromachining, with electrode tips that can include an electroplated
metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g.
iridium oxide) for biocompatibility. The electrode array can be used to
form a part of a neural prosthesis, and is particularly well adapted for
use in an implantable retinal prosthesis where the electrodes can be
tailored to provide a uniform gentle contact pressure with optional
sensing of this contact pressure at one or more of the electrodes.