In a method for fabricating a flip-chip light emitting diode device, a
submount wafer is populated with a plurality of the light emitting diode
dies. Each device die is flip-chip bonded to the submount. Subsequent to
the flip-chip bonding, a growth substrate is removed. The entire submount
is immersed in the etchant solution, exposed to the light for a
prespecified period of time, removed from the solution, dried and diced
into a plurality of LEDs. The LEDs are immediately packaged without any
further processing.