Disclosed is a method for fabricating a thin film transistor for a liquid
crystal display device using four masks and without using a diffraction
mask. The method of the present invention uses a first mask when forming
a gate electrode, a second mask when forming an active pattern, a third
mask when forming a plurality of contact holes at an upper portion of a
channel layer, and a fourth mask when forming a pixel electrode and
source and drain electrodes, so that the resulting liquid crystal display
device may be completed by four masks without using a diffraction
exposure method. Instead of using a diffraction mask, the present
invention uses different etching rates between an insulating layer and an
electrode layer, which is used for source and drain electrodes, in
fabricating a thin film transistor.