A method and apparatus for simultaneously removing conductive materials
from a microelectronic substrate. A method in accordance with one
embodiment of the invention includes contacting a surface of a
microelectronic substrate with an electrolytic liquid, the
microelectronic substrate having first and second different conductive
materials. The method can further include controlling a difference
between a first open circuit potential of the first conducive material
and a second open circuit potential of the second conductive material by
selecting a pH of the electrolytic liquid. The method can further include
simultaneously removing at least portions of the first and second
conductive materials by passing a varying electrical signal through the
electrolytic liquid and the conductive materials. Accordingly, the
effects of galvanic interactions between the two conductive materials can
be reduced and/or eliminated.