A photolithographic machine is described for transferring fine patterns
from a photomask to a flexible roll-to-roll format. It is capable of
printing multiple layers in exact registry onto a distorted format. It
contains 1 to 1 reflective optics, dynamic distortion and magnification
correction. The optical transfer assembly scans reciprocally across the
format and back and the photomask/platen assembly moves incrementally
forward between scans to complete a raster pattern. Both the object and
image fields are autofocussed. The optical transfer assembly is retained
into a straight-line scanning path by opposed air bearings retained on a
straight guide. The photomask/platen assembly is retained into an
orthogonal path by air/vacuum bearings operating on a vertical stone
face. Together this arrangement substantially prevents yaw scanning
errors. The web is fed through the machine from roll to roll without
twisting. It remains stationary during each recording pass.