A milling device is disclosed for the preparation of microscopy specimens
or other surface science applications through the use of ion bombardment.
The device provides the ability to utilize both gross and fine
modification of the specimen surface through the use of high and low
energy ion sources. Precise control of the location of the specimen
within the impingement beams created by the ion sources provides the
ability to tilt and rotate the specimen with respect thereto. Locational
control also permits the translocation of the specimen between the
various sources under programmatic control and under consistent vacuum
conditions. A load lock mechanism is also provided to permit the
introduction of specimens into the device without loss of vacuum and with
the ability to return the specimen to ambient temperature during such
load and unload operation. The specimen may be observed and imaged during
all active phases of operation.