A projection objective for imaging a pattern arranged in an object surface
of the projection objective onto an image surface of the projection
objective using ultraviolet radiation has a plurality of optical elements
including transparent optical elements transparent for radiation at an
operating wavelength .lamda., where 260 nm>.lamda.>150 nm, an
image-side pupil surface arranged between the object surface and the
image surface, and an aperture-defining lens group arranged between the
image-side pupil surface and the image surface for converging radiation
coming from the image-side pupil surface towards the image surface to
define an image-side numerical aperture NA, where
0.7.ltoreq.NA.ltoreq.1.4. The aperture-defining lens group includes at
least one high-index lens made from a transparent high-index material
having a refractive index n.sub.HI, where n.sub.HI>n.sub.SIO2 and
where n.sub.SIO2 is the refractive index of silicon dioxide (SiO.sub.2)
at the operating wavelength.