A method of forming an SRAM cell device includes the following steps. Form
pass gate FET transistors and form a pair of vertical pull-down FET
transistors with a first common body and a first common source in a
silicon layer patterned into parallel islands formed on a planar
insulator. Etch down through upper diffusions between cross-coupled
inverter FET transistors to form pull-down isolation spaces bisecting the
upper strata of pull-up and pull-down drain regions of the pair of
vertical pull-down FET transistors, with the isolation spaces reaching
down to the common body strata. Form a pair of vertical pull-up FET
transistors with a second common body and a second common drain. Then,
connect the FET transistors to form an SRAM cell.