A manufacturing method of an ink-jet recording head for improving relative
positional accuracy between a piezoelectric element and a pressure
generating chamber to improve ink ejection characteristics and stability
thereof. The manufacturing method includes the steps of: forming a
passage-forming layer on a passage-forming substrate and imparting
etching selectivity to a region that will be a space portion of the
passage-forming layer; forming a vibration plate on the passage-forming
layer and a piezoelectric element; performing anisotropic etching on the
passage-forming substrate to form a penetrated portion at least to a
region that will be the space portion, etching the passage-forming layer
to form the space portion, and forming a pressure generating chamber
opposite the space portion; and joining a nozzle plate to the
passage-forming substrate.