A method of fabricating a nanotube field-effect transistor having unipolar
characteristics and a small inverse sub-threshold slope includes forming
a local gate electrode beneath the nanotube between drain and source
electrodes of the transistor and doping portions of the nanotube. In a
further embodiment, the method includes forming at least one trench in
the gate dielectric (e.g., a back gate dielectric) and back gate adjacent
to the local gate electrode. Another aspect of the invention is a
nanotube field-effect transistor fabricated using such a method.