A diffraction element having high diffraction efficiency and large
wavelength-separation effect, which is excellent in mass-productivity and
is formed by a simple process, is obtained. In a diffraction element
having a rectangular grating formed in a surface of a transparent
substrate whose cross-section is of an alternating recessed and
projecting shape and each of the projecting portions is symmetrical, the
period of the grating is equal to or smaller than the wavelength of
incident light and the diffraction element is adopted so that the light
is incident obliquely to its surface where the grating is formed.