An angular velocity sensor having a pillar-shaped vibrator and support
members. The support members clamp the vibrator from above and below, at
those parts where vibration nodes are formed when the vibrator vibrates.
The support members mechanically support the vibrator and are
electrically connected to the vibrator. The support members have an
uppermost layer covered with a silver or gold coating at the electrically
connected parts. Each support member has arms and connecting parts
provided at the distal ends of the arms. The connecting parts have a
notch each. The support members are electrically and mechanically
connected with conductive adhesive provided in the notches, applied to
both surfaces of the connecting part and containing silver particles as
conductive filler.