A microsystem switch (1, 20, 25, 30, 33) has a support (2) defining a
recess (3), and a flexible bridge (6) is mounted on the support (2)
bridging the recess (3). The bridge (6) is shaped so as to hold
selectively a concave stable state, in which the bridge bulges into the
recess (3), and a convex stable state in which the bridge bulges out of
the recess (3). The switch includes an actuator (8, 9; 26, 27) for
effecting flexing of the bridge (6) between the stable states, and a
switching element (7, 31, 34) is mounted on the bridge (6) such that
movement of the bridge between the stable states moves the switching
element between an on position and an off position. According to another
design, a microsystem switch (40, 55) has a support (41) defining a
recess (42), and an elongate torsion member (44) is mounted on the
support (41) bridging the recess (42). A flexible bridge (43, 56) is
mounted on the support (41) bridging the recess (42) in a direction
substantially perpendicular to the torsion member (44). The bridge (43,
56) is connected to the torsion member (44) at the cross-point thereof so
that a first section of the bridge extends between the cross-point and
one side of the recess (42) and a second section of the bridge extends
between the cross-point and the opposite side of the recess (42). The
bridge (43, 56) is shaped so as to hold selectively a first stable state,
in which the first section of the bridge bulges into the recess and the
second section of the bridge bulges out of the recess, and a second
stable state in which this configuration is reversed. A switching element
(45) is mounted at the cross-point of the bridge (43, 56) and torsion
member (44), and an actuator (46a, 46b; 58a, 58b) is again provided for
effecting flexing of the bridge (43, 56) between the stable states. Here,
movement of the bridge (43, 56) between the stable states effects
twisting of the torsion member (44) and rotation of the switching element
(45) between an on position and an off position. Switching devices
incorporating these switches, and switching apparatus comprising arrays
of such switching devices, are also provided.