A nitride semiconductor element exhibiting low leakage current and high
ESD tolerance includes an active layer of nitride semiconductor that is
interposed between a p-sided layer and an n-sided layer, which
respectively consist of a plurality of nitride semiconductor layers, the
p-side layer including a p-type contact layer as a layer for forming
p-ohmic electrodes, the p-type contact layer being formed by laminating
p-type nitride semiconductor layers and n-type nitride semiconductor
layers in an alternate manner.