A lithographic apparatus includes a source for generating radiation bursts
with a predetermined frequency, an illumination system for conditioning
the radiation, a patterning device for patterning the radiation, and a
projection system for projecting the patterned radiation onto a
substrate. The illumination system includes a debris mitigating system
for mitigating debris particles released with the generation of the
radiation. The debris mitigating system is arranged to apply on the basis
of the predetermined frequency a dynamically applicable condition to
which the debris particles are exposed.