A low-level light detector includes an avalanche photodiode (APD) to which is applied a bias voltage adjusted to produce a multiplication factor of not more than 30, and a capacitor for accumulating carriers produced by light in the APD and multiplied using the APD characteristics, the capacitor being connected to the avalanche photodiode. The detector detects the intensity of light impinging on the avalanche photodiode by periodically reading the capacitor voltage and obtaining time-based differences in the voltage, or by resetting the capacitor voltage to a predetermined voltage each time the capacitor voltage is read.

 
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> Imprint lithography template having opaque alignment marks

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