The present invention relates to vacuum pumps and a method for creating
and maintaining a high vacuum. A vacuum pump includes a regenerative
section and a turbo-molecular section. A common first rotor carries
forward-rotating elements of both the regenerative section and the
turbo-molecular section. Additionally, a second rotor carries
counter-rotating elements of the turbo-molecular section. A first drive
rotates the first rotor in a forward rotational direction while a second
drive rotates the second rotor in a counter-rotational direction. The
drives may be controlled to drive the common first rotor on start-up, and
to later drive the second rotor.