A laser oscillation apparatus includes a wavelength change unit for
driving a wavelength selection element in a band-narrowing module and
changing the oscillation wavelength of a laser beam to a target value,
and an oscillation history memory for storing the oscillation state of
the laser beam as an oscillation history. The wavelength change unit
drives the wavelength selection element on the basis of the oscillation
history and changes the oscillation wavelength of the laser beam to the
target value.