The present invention provides a positive resist composition comprising
(A) at least one resin selected from the group consisting of {circle
around (1)} resin which is itself insoluble or poorly soluble in an
alkali aqueous solution but cause a chemical change by the action of an
acid to become soluble in an alkali aqueous solution with a proviso that
the resin is not novolak resin and {circle around (2)} alkali-soluble
resin, (B) novolak resin containing protective group which can be
dissociated by the action of an acid and (C) an acid generator.