A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing
a magnetic field generated by a specimen (78), the sensor including one
of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A C, 52) for
translating the sensor relative to a surface of sad specimen; and a data
processor (50), having an input coupled to an output of said sensor, for
constructing an image of said magnetic field. The sensor preferably
includes one to three sensing units each defining a sensing axis for
sensing a component of a magnetic field from a specimen, the sensing
units disposed such that the sensing axes are orthogonal to one another.
Pluralities of such sensors can be disposed in two or three dimensional
arrays. The SMM can be used for examining the current flow in ICs,
electromigration, magnetic data storage media, biomagnetic systems and
magnetic ink used to print currency.