The present invention is directed to a process for producing structures
containing metallized features for use in microelectric workpieces. The
process treats a barrier layer to promote the adhesion between the
barrier layer and the metallized feature. Suitable means for promoting
adhesion between barrier layers and the metallized features according to
the invention include an acid treatment of the barrier layer, an
electrolytic treatment of the barrier layer, or deposition of a bonding
layer between the barrier layer and metallized feature. The present
invention thus modifies an exterior surface of a barrier layer making it
more suitable for electrodeposition of metal on a barrier, thus
eliminating the need for a PVD or CVD seed layer deposition process.