A piezoelectric element includes a first electrode; a piezoelectric
layered film composed of a first piezoelectric film formed on the first
electrode film and a second piezoelectric film that is formed on the
first piezoelectric film and is controlled in crystal orientation thereof
by the first piezoelectric film; and a second electrode film formed on
the second piezoelectric film. Each of the first and second piezoelectric
films is an aggregate of columnar grains grown unidirectionally along a
thickness direction of the piezoelectric layered film. A columnar grain
of the second piezoelectric film has a larger cross-sectional diameter
than a columnar grain of the first piezoelectric film. A ratio l/d of the
thickness l of the piezoelectric layered film to the cross-sectional
diameter d of the second piezoelectric film is not less than 20 and not
more than 60.