A relay long in service life aiming at higher reliability and lower cost
is achieved by use of a technology of
microelectromechanical.cndot.systems. The relay comprises a flow path
having narrow chokes and wide chokes, formed by bonding two insulating
members together, a plurality of liquid chambers formed by partitioning
the flow path with the narrow chokes and the wide chokes, a plurality of
electrodes disposed at the plurality of the liquid chambers,
respectively, first and second gas chambers disposed so as to communicate
with respective ends of the flow path, a gas sealed in the first and
second gas chambers, respectively, heating means for heating the gas, and
holes defined in one of the insulating members, communicating with the
flow path, respectively, wherein a conductive fluid is introduced into
the flow path through respective inlet ports of the holes, and the
respective inlet ports are sealed.