The present invention provides an electrolytic cell, which can efficiently
produce charged water having an excellent performance of improving
surface cleaning or treatment of an object, e.g., semiconductor, glass,
or resin and of cleaning and sterilizing medical device.
The electrolytic cell of the present invention is for producing charged
anode water suitable for surface cleaning or treatment, including the
cathode chamber 41 and anode chamber 50, fluorinated cation-exchange
membrane 46 provided to separate these chambers from each other, cathode
44 closely attach to the cation-exchange membrane 45 on the side facing
the cathode chamber 41, and middle chamber 48 filled with the
cation-exchange resin 46, provided on the other side of the
cation-exchange membrane 46, the cation-exchange resin 46 being arranged
in such a way to come into contact with the fluorinated cation-exchange
membrane 45, wherein the feed water is passed into the middle chamber 48
and passed thorough the anode chamber 50 to be recovered as the charged
anode water.