A radiation-sensitive resin composition comprising (A) a resin comprising
at least two recurring units of the formulas (1) (6) in the total amount
of 5 70 mol %, but each in the amount of 1 49 mol %, the resin being
insoluble or scarcely soluble in alkali, but becoming easily soluble in
alkali by the action of an acid, and (B) a photoacid generator.
##STR00001## ##STR00002## wherein R.sup.1 is a hydrogen or methyl and
R.sup.2 is a substituted or unsubstituted alkyl group having 1 4 carbon
atoms. The resin composition is useful as a chemically amplified resist
having high transmittance of radiation, sensitivity, resolution, dry
etching resistance, and pattern profile.