A valve for redirecting flow in a supercritical fluid or other high
pressure processing system is disclosed. In high pressure supercritical
carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a
major hurtle in providing clean equipment and clean wafers. A clean flow
diverting valve is provided having no grease or other contaminants, and
having no rubbing seal surfaces, but rather incorporates a magnetically
coupled valve actuator to move a ball or other valve seat for diverting
flow between a common port and alternative switched ports in a
non-rubbing, non-contact manner. The valve is useful in semiconductor
wafer high pressure processing tools for redirecting flow from a common
inlet to alternative outlets or for admitting flow from alternative
inlets to a common outlet.