A method is disclosed for conducting optical proximity correction (OPC) on
at least two features in a circuit design. After detecting a first
feature having at least one end thereof to be in the proximity of one end
of a second feature, a first OPC pattern is incorporated to the end of
the first feature toward a first direction; and a second OPC pattern is
incorporated to the end of the second feature toward a second direction
that is substantially opposite from the first direction.