Provision of a 3-DOF micro manipulator easy to operate and capable of
executing accurate positioning, wherein the link mechanisms of the micro
manipulator whose main operation is parallel 3-DOF operation are
implemented by cutting, folding, and moding a sheet of metal plate. Base
and end effector are connected by three link mechanisms. The three link
mechanisms are manufactured by cutting and folding a flexible plate
material, and are equipped with plate-like arm portions each having a
spread in the axially peripheral direction of the end effector, with
hinge portions that are formed longitudinally across each arm portion in
order to function as revolving joints R, and with a hinge portion also
formed at the middle position of the arm portion in order to function as
revolving joints R. Also, a parallelogrammatic link is formed between one
longitudinal end of the arm portion and the middle portion thereof in
order to function as a prismatic joint pair P.