An integrated semiconductor structure having different types of
complementary metal oxide semiconductor devices (CMOS), i.e., PFETs and
NFETs, located atop a semiconductor substrate, wherein each CMOS device
is fabricated such that the current flow for each device is optimal is
provided. Specifically, the structure includes a semiconductor substrate
that has a (110) surface orientation and a notch pointing in a
<001> direction of current flow; and at least one PFET and at least
one NFET located on the semiconductor substrate. The at least one PFET
has a current flow in a <110> direction and the at least one NFET
has a current flow in a <100> direction. The <110> direction
is perpendicular to the <100> direction. A method of fabricating
such as integrated semiconductor structure is also provided.