In a method and apparatus for handling semiconductor materials, a robot
arm includes a tubular shaft having a distal end and a proximal end. A
distal block disposed over the distal end is detachably secured to the
distal end and a proximal block disposed over the proximal end is
detachably secured to the proximal end. The tubular shaft, which has an
adjustable length, is formed from a warp-resistant material that has
sufficient strength to maintain a longitudinal axis alignment of the
tubular shaft within a predefined tolerance. The distal block and the
proximal block are customized to substantially match corresponding
features of a legacy robot arm, thereby enabling a complete replacement
of the legacy robot arm.