A method and device are presented for measuring the electrical properties of a specimen. The specimen is excited with high energy radiation to cause emission of internal charged particles from the specimen. Electrical power is supplied to a circuit, that is formed by the specimen and any added component connected to a back contact of the specimen. The electric power supply includes at least one of the following: irradiating the circuit with low energy charged particles; subjecting the circuit to an external field of the kind affecting the flux of emitted internal charged particles, and supplying a bias voltage to the back contact of the specimen. During the power supply to the specimen, at least one of the following is carried out: an electric current through the specimen is measured, and the emitted charged particles are analyzed versus their energy (using a contactless voltmeter) which provides local potential values at chemical entities of the specimen. This technique enables determination of rich, chemically resolved, electrical properties of a specimen, such as I V characteristic, and/or evaluation of a work function characteristic, and/or characterization of electric leakage or breakdown conditions of the sample, and/or characterization of accumulation of charge within at least one region of the sample, and/or chemically resolved photovoltaic characteristics (photovoltage and/or photocurrent) of the sample.