The invention includes a toploading weighing instrumentality which determines loss on drying by a cylindrical microwave. The cylindrical cavity of the microwave includes a power supply, a magnetron, a power module operatively coupled between the power supply and the magnetron for driving the magnetron, a wave guide communicating with the magnetron and with a microwave containment chamber for delivering energy, and at least one microwave energy sensor for sensing microwave energy or magnetic and/or electric field strengths within the chamber for controlling, inter alia, the loss on drying process of the sample being assayed and determining when the drying process is complete. A precision electronic balance is operatively disposed within the microwave chamber for allowing a specimen being assayed to be weighed. In addition, a ventilation chamber is provided for venting moisture from the microwave chamber. A processing unit provides for data acquisition, processing and storage.

 
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> Position detecting method and apparatus, exposure apparatus and device manufacturing method

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