A system, apparatus and/or method is provided for fabricating an
integrated capacitor during the fabrication of a transistor employing
chemical mechanical polishing of a gate electrode of the transistor.
Components of the integrated capacitor, particularly the lower electrode
of a parallel plate capacitor in one form thereof, and an outer plate of
a cylindrical-like capacitor in another form thereof, are defined by the
polish stop layer during chemical mechanical polishing (CMP) of a gate of
the transistor. According to an aspect of the subject invention, the
polish stop layer may be an oxide or a nitride.