A plasma processing apparatus having a process chamber in which an object
to be processed is subjected to plasma processing includes a
light-receiving part for a spectrometer unit, an arithmetic unit, a
database, a determination unit and an apparatus controller. The
determination unit determines a condition in the processing chamber that
an end point of seasoning is reached. The determination of the condition
is performed so that one or more differences between one or more output
signals derived from a batch of plasma emission data by multivariate
analysis and one or more output signals derived from a preceding batch of
plasma emission data are found, an average value of the differences in
one batch, a difference between a maximum and a minimum of the
differences in one batch and a standard deviation of the differences in
one batch are determined, and the values are compared with a preset
threshold.