An apparatus and method is disclosed for automatically controlling
single-input-multi-output (SIMO) systems or processes. The control output
signals of a plurality of single-input-single-output (SISO) automatic
controllers are combined by a combined output setter so that these SISO
controllers are converted to a multi-input-single-output (MISO) automatic
controller based on certain criteria; and its resulting controller output
signal is able to manipulate only one actuator to control a plurality of
continuous process variables or attempt to minimize a plurality of error
signals between the setpoints and their corresponding process variables.
Without the need of building process mathematical models, this inventive
apparatus and method is useful for automatically controlling unevenly
paired multivariable systems or processes where there are less system
inputs than outputs including but not limited to industrial furnaces,
rapid thermal processing (RTP) chambers, chemical mechanical
planarization (CMP) systems, and distillation columns.