The present invention provides an aluminum etchant solution for etching an
aluminum surface in the presence of solder bumps. The etchant solution
includes about 42% to about 80% phosphoric acid; about 0.1% to about 6%
nitric acid; about 5% to about 40% acetic acid; about 0.005% to about 5%
of an amine oxide surfactant; about 0.1% to about 8% of a Pb solubilizing
additive; and about 5 to about 25% de-ionized water; wherein the solder
bumps are substantially phosphate free after the etching. Also provided
is a process for etching an exposed aluminum surface in a semiconductor
structure in the presence of solder bumps including the steps of:
contacting the exposed aluminum surface with the etchant solution;
rinsing the semiconductor structure with de-ionized water; and drying the
semiconductor structure to remove residual water; wherein the solder
bumps are substantially phosphate free after the etching.