According to an embodiment, a box for transporting a lithographic
patterning device is arranged to cooperate with a lithographic apparatus.
The transport box may be provided with a container part having an inner
space with a storing position for storing the patterning device and an
opening for the transfer of the patterning device. Prior to transfer of
the patterning device from the inner space to the apparatus, the inner
space is pressurized. The box may also comprise a closure part for
closing the opening, and/or a channel system for evacuating and/or
feeding gasses from/to the inner space of the box. Other embodiments
include a lithographic apparatus comprising and/or configured to
cooperate with such a box.