An aqueous thiourea-free gold etching bath for electrolytically etching
gold from a microelectronic workpiece. One embodiment of the aqueous
thiourea-free bath contains: (a) about 0.5 1.5 M iodide; (b) about 0.1
0.3 M sulfite; and (c) about 1.0 3.0 g/L wetting agent. The bath is
useful in a process for electrolytically etching gold from a
microelectronic workpiece. A tool system in which the baths and processes
of the present invention may be used is also described.