A method and structure are disclosed with a simplified approach for
fabricating a LiNbO3 wafer with Ti indiffusion wafeguide on the surface
that is domain inverted. The method involves indiffusing Ti into
LiNbO.sub.3 with a predefined temperature and time indiffusion range, a
Li enriched and dry oxygen atmosphere, which allows making optical
waveguides on the z- crystal face without any significant domain
inversion occurring on the z+ face of the crystal. This allows for
subsequent poling without the need of any additional removal of the thin
domain inverted layer which would otherwise appear on the z+ face. Even
in instance where a thin domain inversion layer is formed, it is
insufficient thick to prevent poling, eliminating the need for the
grinding process.