Methods for forming porous insulative materials for use in forming
dielectric structures of semiconductor devices are disclosed. Each
insulative material may include a first, substantially nonporous state
and a second, porous state. When in the first state, the insulative
materials may be processed or support layers or structures which are
being processed. When in the second state, the insulative materials have
a reduced dielectric constant and, thus, increased electrical insulation
properties. Semiconductor device structures including layers or other
features formed from one of the insulative materials are also disclosed.
Methods for forming the insulative material and for causing the
insulative material to become porous are also disclosed.