Apparatus/method providing bandwidth control in narrow band short pulse
duration gas discharge laser output light pulse beam producing systems,
producing a beam comprising pulses at selected pulse repetition races,
e.g., comprising a dispersive bandwidth selection optic selecting at
least one center wavelength for each pulse determined at least in part by
the angle of incidence of the beam containing the respective pulse on the
optic; a tuning mechanism operative to select at least one angle of
incidence of the beam containing the respective pulse upon the optic; the
tuning mechanism comprising a plurality of incidence angle selection
elements each defining an angle of incidence for a different spatially
separated but not temporally separated portion of the pulse to return
from the optic a laser light pulse comprising a plurality of spatially
separated but not temporally separated portions, each having one of at
least two different selected center wavelengths.