The present invention provides an electrolytic processing apparatus which
can suppress the growth of a gas, which is inevitably generated during
electrochemical processing, into bubbles thereby effectively preventing
the formation of pits in a surface of a workpiece. The electrolytic
processing apparatus includes an electrode section (44) including
processing electrodes (76) and feeding electrodes (78) both having a
diameter of not more than 1 mm, a substrate holder (42) for holding a
workpiece (W), a power source (46) for applying a voltage between the
processing electrodes and the feeding electrodes, a fluid supply section
(72) for supplying a fluid between the electrode section and the
workpiece, and a drive section (56, 62) for moving the electrode section
and the workpiece relative to each other in such a manner that the
processing electrodes pass every point in a processing surface of the
workpiece.