Object of the preferred embodiment is to remove sol-form microparticles
and nitrogen components contained in CMP wastewater. Sol-form
microparticle components contained in CMP wastewater are removed by a
filtration treatment using a filter device 13, having a gel-form second
filter. Also, nitrogen components in the CMP wastewater are removed by an
electrochemical treatment using electrode 12. The filtration treatment
and the electrochemical treatment can be carried out in individual tanks
or can be carried out in the same tank. By performing the filtration
treatment and the electrochemical treatment in the same tank, a
space-saving water treatment device can be provided.