A plasma processing apparatus for processing a sample within a vacuum
vessel, including: a plurality of sensors for detecting plural kinds of
information relating to a processing state of the sample as monitor data;
data selecting means for selecting a detection time range of the monitor
data thus detected which is used for monitoring the plasma processing
apparatus; a signal filter for converting the monitor data within the
selected detection time range into an effective signal; a model
expression unit for generating a predicted value of a patterned
physical-shape of a sample based on the effective signal; and a display
screen for displaying the patterned physical-shape predicted value;
wherein the display screen displays the patterned physical-shape
predicted value without measuring a patterned shape after processing of
the sample.