A technique for fabricating a resistor on a flexible substrate.
Specifically, at least a portion of a polyimide substrate is activated by
exposure to a ion sputter etch techniques. A metal layer is disposed over
the activated portion of the substrate, thereby resulting in the
formation of a highly resistive metal-carbide region. Interconnect layers
are disposed over the metal-carbide region and patterned to form
terminals at opposite ends of the metal carbide region. The metal-carbide
region is patterned to form a resistor between the terminals.
Alternatively, only a selected area of the polyimide substrate is
activated. The selected area forms the area in which the metal-carbide
region is formed. Interconnect layers are disposed over the metal-carbide
region and patterned to form terminals at opposite ends of the
metal-carbide region.