An example of a multi-layer structure which may be used for supporting a
transducer includes a support layer and an etch stop layer formed from a
refractory metal on the support layer. A first electrically conducting
layer of copper may be positioned on the etch stop layer. A dielectric
layer may be provided on the first electrically conducting layer. A
second electrically conducting layer of copper may be provided on the
dielectric layer. The dielectric layer is positioned between the first
electrically conducting layer and the second electrically conducting
layer. The second electrically conducting layer may include a plurality
of separate electrically conducting lines.