The present invention provides techniques to fabricate high dielectric MIM
storage cell capacitors. In one embodiment, this is accomplished by
forming a silicon contact is then formed to electrically connect the
formed bottom electrode layer in the container with the at least one
associated transistor device. A titanium nitride barrier layer is then
formed over the silicon contact. An oxygen barrier layer including
platinum stuffed with silicon oxide is then formed over the titanium
nitride layer and below the bottom electrode layer. A bottom electrode
layer is then formed using platinum over interior surfaces of a container
formed relative to at lest one associated transistor device on a silicon
substrate. Further, a high dielectric insulator layer is formed over the
bottom electrode layer. A top electrode layer is then formed over the
high dielectric insulator layer.