An X-ray crystal orientation measuring apparatus and a method thereof, for
enabling to measure distribution of crystal orientations upon a crystal
having the sub-grain structure, lineage structure, other than the single
domain, with using X-ray, comprises, an XY stage 20 for mounting a
crystal S to be measured thereon and being movable in X-Y directions, an
X-ray generating device 50 for irradiating X-ray at a predetermined angle
upon a measuring surface of the crystal to be measured on the stage, a
high-sensitive two-dimensional detector 60 for detecting the diffraction
image of X-ray, which is irradiated from the X-ray generating device upon
the measuring surface of the crystal to be measured, and a control PC,
wherein the control PC calculates out a central position of the
diffraction image detected, from the detected screen, so as to calculate
out the crystal orientation upon the measuring surface of the crystal to
be measured.